CONTEXT

Carbon nanotubes are grown in large scale by CVD methods but the control ot their position and size is not easy. Applications such as electronic components, display, emission electron require however that the position oh the CNT is optimised.

TECHNICAL DESCRIPTION

The invention relates to a process for growing single wall or double wall Carbon Nanotubes on a substrate using a catalyst composed of a bilayer of titanium and cobalt and the hot filament assisted CVD method. Depending on catalyst and growth conditions and substrate shape, CNTs can grow on top or on side of flat steps or extend from the apex of a tip.

BENEFITS

Control of the growth location, orientation and length of CNTs on the substrate.

INDUSTRIAL APPLICATIONS

– Nanosensors, NEMS
– AFM tips
– Electronic
– Field emission

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